Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques-Reference-Cited by-同舟云学术

Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

Published:2010 Issue:3 Volume:130 Page:65-68
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Yamazaki Daisuke¹,Ueda Toshitsugu¹

Affiliation:

1. Graduate School of Information, Production and Systems, Waseda University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://www.jstage.jst.go.jp/article/ieejsmas/130/3/130_3_65/_pdf

Reference10 articles.

1. Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

2. (2) D. Yamazaki, L. Zhang, J. Pawlat, and T. Ueda : “Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques”, Proc. of the 24^Th Sensor Symposium, pp. 288-291 (2007)

3. (3) K. Yamanaka, S. Ishikawa, N. Nakaso, and N. Takeda : “Ball SAW device for hydrogen gas sensor”, Ultrasonics Symposium, IEEE (2003)

4. (4) M. Nishibori, W. Shin, L. F. Houlet, K. Tajima, T. Itoh, N. Izu, N. Murayama, and I. Matsubara : “New structural design of micro-thermoelectric sensor for wide range hydrogn detection”, Journal of Ceramic Society of Japan, Vol. 144, No. 10, pp. 853-856 (2006)

5. (5) W. Shin, M. Matsumiya, F. Qiu, N. Izu, and N. Murayama : “Thermmoelectric gas sensor for detection of high hydrogen concentration”, Sensors and Actuators, Vol. B 97, pp. 344-347 (2004)

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Intrinsic Safety for Wireless Hydrogen Gas Sensor;Transactions of the Society of Instrument and Control Engineers;2016

2. Thermal decomposition and fractal properties of sputter-deposited platinum oxide thin films;Journal of Materials Research;2011-12-20

3. Development of Hydrogen Gas Sensors Using Quartz Resonator;IEEJ Transactions on Sensors and Micromachines;2011