Electrostatic Microelectromechanical Logic Devices Made by CMOS-compatible Surface Micromachining-Reference-Cited by-同舟云学术

Electrostatic Microelectromechanical Logic Devices Made by CMOS-compatible Surface Micromachining

Published:2020-01-01 Issue:1 Volume:140 Page:2-13
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Mita Makoto¹,Ataka Manabu²,Toshiyoshi Hiroshi²

Affiliation:

1. Institute of Space and Astronautical Science, The Japan Aerospace Exploration Agency

2. Institute of Industrial Science, The University of Tokyo

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/140/1/140_2/_pdf

Reference22 articles.

1. (1) D. B. Estreich and R. W. Dutton: “Modeling Latch-Up in CMOS Integrated Circuits”, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. CAD-I, No. 4, pp. 157-162 (1982)

2. (2) R. C. Baumann: “Radiation-Induced Soft Errors in Advanced Semiconductor Technologies”, IEEE Transactions on Device and Materials Reliability, Vol. 5, No. 3, pp. 305-316 (2005)

3. (3) C.-Y. Tsai, W.-T. Kuo, C.-B. Lin, and T.-L. Chen: “Design and fabrication of MEMS logic gates”, J. Micromech. Microeng., 18, 045001 (10pp) (2008)

4. (4) S. Chakraborty, A. R. Chaudhuri, and T. K. Bhattacharyya: “Design and analysis of MEMS cantilever based binary logic inverter”, in Proc. 2009 Int. Conf. on Advances in Computing, Control, and Telecommunication Technologies, Trivandrum, Kerala, India, pp. 184-188 (2009)

5. (5) T.-H. Lee, S. Bhunia, and M. Mehregany: “Electromechanical Computing at 500 °C with Silicon Carbide”, Science, Vol. 329, Sept. 10, pp. 1316-1318 (2010)

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