Fabrication Techniques of Low-cost PZT Pyroelectric Sensor Adopt the Lift-off Patterned Pt Electrode-Reference-Cited by-同舟云学术

Fabrication Techniques of Low-cost PZT Pyroelectric Sensor Adopt the Lift-off Patterned Pt Electrode

Published:2016 Issue:8 Volume:136 Page:337-342
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Mizusaki Hideaki¹,Iida Yusuke¹,Yonekubo So¹,Sato Toshiro²,Sonehara Makoto²

Affiliation:

1. Nagano Prefecture General Industrial Technology Center

2. Faculty of Engineering, Shinshu University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/136/8/136_337/_pdf

Reference13 articles.

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2. (3) K. K. Maurya, S. K. Halder, S. Sen, A. Bose, and S. Bysakh : “High resolution X-ray and electron microscopy characterization of PZT thin films prepared by RF magnetron sputtering”, Applied Surface Science, Vol. 313, pp. 196-206 (2014)

3. (4) T. Kobayashi, M. Ichiki, J. Tsaur, and R. Maeda : “Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition”, Thin Solid Films, Vol. 489, pp. 74-78 (2005)

4. (5) G. He, Y. Zhang, C. Peng, and X. Li : “Surface morphology and ferroelectric properties of compositional gradient PZT thin films prepared by chemical solution deposition process”, Applied Surface Science, Vol. 283, pp. 532-536 (2013)

5. (6) N. Wakiya, K. Shinozaki, and N. Mizutani : “Crystal Growth of Pb (Zr, Ti) O₃ (PZT) Thin Film by Introducing SrTiO₃ Seed Buffer Layer”, Journal of the Ceramic Society of Japan, Vol. 110, No. 5, pp. 358-361 (2002)

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