Affiliation:
1. Kyoto Institute of Technology
2. Osaka University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Reference8 articles.
1. Silicon Micromachined Ultrasonic Transducers
2. (2) P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P. K. Weber, W. Steichen, S. Petitgrand, A. Bosseboeuf, N. Setter, and P. Gaucher: “Study of PZT Coated Membrane Structures for Micromachined Ultrasonic Transducers”, 2001 IEEE Ultrason. Symp. Proc., pp. 907-911, New York, USA (2001-10)
3. (3) Z. H. Wang, J. M. Miao, T. Xu, G. Barbastathis, and M. Triantaffylou: “Micromachined Piezoelectric Microphone with High Signal to Noise Ratio”, Tech. Dig. Transducers 2009, pp. 1553-1556, Denver, USA (2009-6)
4. (4) K. Yamashita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, and Y. Suzuki: “Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms”, Sens. Actuat. A, Vol. 97-98, pp. 302-307 (2002)
5. Sensitivity Change on Piezoelectric Ultrasonic Microsensors by Variation of Diaphragm Structures
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献