Poling Effect to Piezoelectric Diaphragm-Type Ultrasonic Microsensors and Sensitivity Enhancement through Buckling Profile Control

Author:

Yamashita Kaoru,Tanaka Hikaru,Noda Minoru

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference8 articles.

1. Diaphragm Deflection Control of Piezoelectric Ultrasonic Microsensors for Sensitivity Improve- ment;Yamashita;Sens. Actuat. A,2007

2. Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering;Jaber;Sens. Actuat. A,1997

3. Characterization of piezoelectric property of sol-gel PZT thin films and its improvement by poling;Yamashita;IEEJ Trans. SM,2004

4. Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms;Yamashita;Sens. Actuat. A,2002

5. Sensitivity-Enhanced Ultrasonic Microsensors on Buckled Diaphragms through Stress Balance Control of Multilayered Structure;Yamashita;IEEE Sensors 2013 Conf. Proc.,2013

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