Reduction of Residual Vibration of Piezoelectric Actuator Driven by Series of Current Pulses
Author:
Affiliation:
1. Toyota Technological Institute
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/137/1/137_8/_pdf
Reference34 articles.
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3. (3) G. Y. Gu and L. M. Zhu : “Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation”, Sens. Actuators A, Vol. 197, pp. 76-87 (2013)
4. (4) Habibullah, H. R. Pota, I. R. Petersen, and M. S. Rana : “Creep, Hysteresis, and Cross-Coupling Reduction in the High-Precision Positioning of the Piezoelectric Scanner Stage of an Atomic Force Microscope”, IEEE Trans. Nanotechnol., Vol. 12, No. 6, pp. 1125-1134 (2013)
5. (5) J. J. Dosch, D. J. Inman, and E. Garcia : “A Self-Sensing Piezoelectric Actuator for Collocated Control”, J. Intell. Mater. Syst. Struct., Vol. 3, No. 1, pp. 166-185 (1992)
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