Development of a MEMS Gas Flow Sensor Unified with an Impurity-Gas Concentration Sensor
Author:
Affiliation:
1. MKT TAISEI Co., Ltd.
2. Taisei Co., Ltd.
3. HEMMI Slide Rule Co., Ltd.
4. Flow Techno Service
5. Tohoku Gakuin University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/ieejsmas/130/8/130_8_412/_pdf
Reference6 articles.
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2. Microheater and microbolometer using microbridge of SiO2 film on silicon
3. (3) T. Neda, K. Nakamura, and T. Takumi : “A polysilicon flow sensor for gas flow meters”, Sensors and Actuators A: Physical, Vol. 54, No. 1-3, pp. 626-631 (1996)
4. (4) T. Neda, K. Nakamura, and T. Takumi : “Integrated and microheater embedded gas sensor array based on the polymer composites dispensed in micromachined wells”, Sensors and Actuators B, Vol. 105, pp. 549-555 (2005)
5. Sensitivity enhancement of a silicon micro-machined thermal flow sensor
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