Optical Absorption of the Polymer Film Fabricated by Plasma Enhanced Polymerization from C6H6 and C6H10 in Ar and CF4 Atmosphere Gas-Reference-Cited by-同舟云学术

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Optical Absorption of the Polymer Film Fabricated by Plasma Enhanced Polymerization from C6H6 and C6H10 in Ar and CF4 Atmosphere Gas

Published:2009 Issue:9 Volume:129 Page:651-656
ISSN:0385-4205
Container-title:IEEJ Transactions on Fundamentals and Materials
language:en
Short-container-title:IEEJ Trans. FM

Author:

Moriki Kazunori¹,Yumoto Motoshige¹

Affiliation:

1. Faculty of Engineering, Tokyo City University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering

Link

http://www.jstage.jst.go.jp/article/ieejfms/129/9/129_9_651/_pdf

Reference16 articles.

1. Fabrication of an Optical Polymer Waveguide by Plasma Enhanced Polymerization

2. 森木一紀.佐藤徹治.板橋敦.湯本雅恵:「プラズマ支援重合法による高分子光導波路の形成」,電学論A, 128, 2, pp. 75-80 (2008-2)

3. (2) J. Robertson : “Electric and atomic structure of diamond-like carbon”, Semicond. Sci. Technol., Vol. 18, pp. S12-S19 (2002)

4. Evaluation of the [C(sp3)]/[C(sp2)] ratio in diamondlike films through the use of a complex dielectric constant

5. Low density of defect states in hydrogenated amorphous carbon thin films grown by plasma-enhanced chemical vapor deposition

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