Fabrication of an Optical Polymer Waveguide by Plasma Enhanced Polymerization-Reference-Cited by-同舟云学术

Fabrication of an Optical Polymer Waveguide by Plasma Enhanced Polymerization

Published:2008 Issue:2 Volume:128 Page:75-80
ISSN:0385-4205
Container-title:IEEJ Transactions on Fundamentals and Materials
language:en
Short-container-title:IEEJ Trans. FM

Author:

Moriki Kazunori¹,Satoh Tetsuji¹,Itabashi Atsushi¹,Yumoto Motoshige¹

Affiliation:

1. Faculty of Engineering, Musashi Institute of Technology

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering

Link

https://www.jstage.jst.go.jp/article/ieejfms/128/2/128_2_75/_pdf

Reference10 articles.

1. (1) M. Chhowalla, J. Robertson, C. W. Chen, S. R. P. Silva, C. A. Davis, G. A. J. Amaratunga, and W. I. Milne : “Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films”, J. Appl. Phys., Vol. 81, pp. 139-145 (1997)

2. (2) J. Fink, Th. Muller-Heinezerling, J. Pfluger, B. Scheerer, B. Dischler, P. Koidl, A. Bubenzer, and B. E. Sah : “IInvestigation of hydrocarbon-plasma-generated carbon filmes by electron-energy-loss spectroscopy”, Phys. Rev. B, Vol. 30, pp. 4713-4718 (1984)

3. (3) K. M. Krishana, H. Ebisu, K. Hagimoto, Y. Hayashi, T. Soga, and M. Umeno : “Low density of defect state in hydrogenated amorphous carbon thin films geown by plasma-enhanced chemical vapor deposition”, Appl. Phys. Lett., Vol. 78, pp. 294-296 (2001)

4. (4) K. F. Jansen and M. Machonkin : “ICharacterization of amorphous carbon-hydrogen films by solid-state nuclear magnetic resonance”, Appl. Phys. Lett., Vol. 47, pp. 750-753 (1985)

5. (5) Y. Bounouh, M. L. Theye, A. Dehbi-Alaoui, A. Matthews, and J. P. Stoquert : “Influence of annealing on the hydrogen bonding and the microstructure of diamondlike and polymerlike hydrogenated amorphous carbon films”, Phys. Rev. B, Vol. 51, pp. 9597-9605 (1995)

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