1. (3) H. Mekaru, S. Kusumi, N. Sato, M. Shimizu, M. Yamashita, O. Shimada, and T. Hattori : “Development of a 3-Dimentional LIGA Process and Application to Fabricate a Spiral Microcoil”, IEEJ Trans. SM, Vol. 127, No. 2, pp. 160-166 (2007) (in Japanese)
2. (4) Y. Lu and H.-F. Ji : “Fabrication of microcoil/microsprings for novel chemical and biological sensing”, Sensors & Actuators B, Vol. 123, pp. 937-941 (2007)