Investigation of an Appropriate Nominal Model and High-Precision Positioning of Large-Scale Stage Using Perfect Tracking Control
Author:
Affiliation:
1. Nikon Corporation
2. Yokohama National University
3. The University of Tokyo
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering
Link
http://www.jstage.jst.go.jp/article/ieejias/130/8/130_8_1022/_pdf
Reference14 articles.
1. (1) M. Iwasaki, M. Miyaji, and N. Matsui: “High-Precision Contouring Control of Table Drive System in Machine Tools Using Lost Motion Compensation”, T. IEE Japan, Vol. 125-D, No. 6, pp. 616-622 (2005-6) (in Japanese)
2. 岩崎 誠.宮路 匡.松井信行:「ロストモーション補償による工作機械テーブル駆動系の高精度軌跡制御」, 電学論D, 125, 6, pp. 616-622 (2005-6)
3. (3) S. Wakui: “A Realizing Method of Collocated Condition for Micro-Moving Stage and Its Control Performance”, T. IEE Japan, Vol. 171-D, No. 9, pp. 1174-1175 (1997-9) (in Japanese)
4. 涌井伸二:「微動ステージに対するコロケーション実現の一方法とその制御特性」, 電学論D, 117, 9, pp. 1174-1175 (1997-9)
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