Preparation of Flexible Thin Films from Epitaxially Grown Anatase Nb: TiO2 Using Water-Soluble Sr3Al2O6 Sacrificial Layer
Author:
Affiliation:
1. Graduate School of Biology-Oriented Science and Technology, Kindai University
2. Institute for Materials Research, Tohoku University
3. Faculty of Biology-Oriented Science and Technology, Kindai University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering
Link
https://www.jstage.jst.go.jp/article/ieejeiss/141/7/141_767/_pdf
Reference13 articles.
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2. (2) M. O. G. Nayeem, S. Lee, H. Jin, N. Matsuhisa, H. Jinno, A. Miyamoto, T. Yokota, and T. Someya : “All-nanofiber-based, ultrasensitive, gas-permeable mechanoacoustic sensors for continuous long-term heart monitoring”, PNAS, Vol. 117, No. 13, pp. 7063-7070 (2020)
3. (3) H. Kozuka, T. Fukui, and H. Uchiyama : “Sol-gel and transfer technique for fabricating dual ceramic thin film patterns on plastics”, J. Sol-Gel Sci. Technol., Vol. 67, pp. 414-419 (2013)
4. (4) A. Kobayashi, J. Ohta, and H. Fujioka : “Pulsed sputtering epitaxial growth of m-plane InGaN lattice-matched to ZnO”, Sci. Rep., Vol. 7, 12820 (2017)
5. (5) H. Nishikawa, Y. Morita, M. Kusunoki, S. Hontsu, H. Tanaka, and T. Endo : “Preparation of [100] oriented SrTiO3 thin films on flexible polymer sheets”, Jpn. J. Appl. Phys., Vol. 53, No. 5S1, 05FB06 (2014)
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