Détermination du coefficient d'absorption des rayons X à partir des mesures de réflectométrie X

Abstract

In this paper, we present a simple method that allows, among other things, to determine the absorption coefficient of X-rays from reflectivity measurements. This method is applicable if the analysed material is deposited on a substrate denser than the material layer, so that the X-rays reflectivity spectra exhibit two well-resolved descents. In such cases, the amplitude of the first descent (characteristic of the material layer) is directly related to the linear absorption coefficient of the material constituting the layer. We have been able to clarify this relationship and apply it successfully for several cases of materials, especially amorphous carbon and silicon. Values of thus obtained mass absorption coefficients are in very good agreement with those tabulated in the literature.[Journal translation]