Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream

Author:

Tanişli Murat1,Rafatov İsmail2,Şahin Neslihan1,Mertadam Sercan1,Demir Süleyman1

Affiliation:

1. Department of Physics, Anadolu University, 26470 Eskişehir, Turkey.

2. Department of Physics, Middle East Technical University, 06800 Ankara, Turkey.

Abstract

In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650–900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron temperature are identified. In addition, the numerical modelling of the discharge parameters is carried out by using the “extended” fluid model for plasma, and consistency between numerical and experimental results is discussed.

Publisher

Canadian Science Publishing

Subject

General Physics and Astronomy

Reference48 articles.

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3. X. Fei. Characterization, comparison and application of two types of atmospheric pressure cold argon plasma jets. PhD Thesis Gunma University. 2011.

4. Cold plasma chemistry and diagnostics

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