Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model
Author:
Affiliation:
1. Institute of Innovative Research, Tokyo Institute of Technology, Tokyo, Japan
Funder
Japan Society for the Promotion of Science
Publisher
Informa UK Limited
Subject
General Physics and Astronomy
Link
https://tandfonline.com/doi/pdf/10.1080/23746149.2019.1592707
Reference93 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Plasma Chemistry
3. Hippler R, Kersten H, Schmidt M, et al. Low temperature plasmas. Weinheim, Germany: Wiley; 2008. vol. 257–281.
4. Thermal Plasmas
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