A Silicon Micromachined Gyroscope and Accelerometer for Vehicle Stability Control System
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SAE International
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Stress Isolation Suspension for Silicon-on-Insulator 3-Axis Accelerometer Designed by Topology Optimization Method;IEEE Sensors Journal;2022-03-01
2. Improved anchor design for flat MEMS structure by suppressing deformation due to buried-oxide stress on silicon-on-insulator wafer;Journal of Micromechanics and Microengineering;2021-02-11
3. Automotive Applications;Reference Module in Materials Science and Materials Engineering;2017
4. A Custom Integrated Circuit with On-chip Current-to-Digital Converters for Active Hydraulic Brake System;SAE International Journal of Passenger Cars - Electronic and Electrical Systems;2016-04-05
5. Toward Practically Applicable MEMS;IEEJ Transactions on Sensors and Micromachines;2014
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