Plasma Sources for Production of High Flux Particle Beams in Hyperthermal Energy Range-Reference-Cited by-同舟云学术

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Plasma Sources for Production of High Flux Particle Beams in Hyperthermal Energy Range

Published:2009-05-30 Issue:3 Volume:18 Page:186-196
ISSN:1225-8822
Container-title:Journal of the Korean Vacuum Society
language:en
Short-container-title:Journal of the Korean Vacuum Society

Author:

Yoo S.J.,Kim S.B.

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://ocean.kisti.re.kr/downfile/crosscheck/kvs/JAKO200919463953051.pdf

Reference18 articles.

1. Hyperthermal neutral beam sources for material processing (invited)

2. Ion-energy effects in silicon ion-beam epitaxy

3. A source of hyperthermal neutrals for materials processing

4. Theory of Auger Ejection of Electrons from Metals by Ions

5. Theory of Auger neutralization and deexcitation of slow ions at metal surfaces

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas;Plasma Sources Science and Technology;2015-01-13

2. Deposition of a Continuous and Conformal Copper Seed Layer by a Large-Area Electron Cyclotron Resonance Plasma Source with Embedded Lisitano Antenna;Plasma Chemistry and Plasma Processing;2013-11-12

3. Inclined slot-excited annular electron cyclotron resonance plasma source for hyperthermal neutral beam generation;Review of Scientific Instruments;2011-01

4. Microwave Propagation in the Plasma for 28 GHz Superconducting ECRIS;Journal of the Korean Vacuum Society;2010-11-30

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