Inclined slot-excited annular electron cyclotron resonance plasma source for hyperthermal neutral beam generation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3523425
Reference12 articles.
1. Hyperthermal neutral beam sources for material processing (invited)
2. Plasma Charging Damage
3. Theory of Auger neutralization and deexcitation of slow ions at metal surfaces
4. Energy Distribution of Neutrals from a Hyperthermal Neutral Beam (HNB) Source
5. Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam
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