Optimizing a CVD-based Crystallization Process Using Neutral Particle Showering Deposition for Flexible Display-Reference-Cited by-同舟云学术

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Optimizing a CVD-based Crystallization Process Using Neutral Particle Showering Deposition for Flexible Display

Published:2020-11-30 Issue:6 Volume:29 Page:154-156
ISSN:2288-6559
Container-title:Applied Science and Convergence Technology
language:en
Short-container-title:Appl. Sci. Converg. Technol.

Author:

Kim Hyun-ki¹,Choi Byoung-deog¹

Affiliation:

1. Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea

Funder

Sungkyunkwan University

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://pdf.medrang.co.kr/ASCT/2020/029/ASCT029-06-05.pdf

Reference11 articles.

1. Organic electroluminescent diodes

2. Material and solar cell research in microcrystalline silicon

3. Y. Oana, J. Soc. Inf. Display 9, 3 (2012).

4. Energetics of bond-centered hydrogen in strained Si-Si bonds

5. Deposition mechanism of hydrogenated amorphous silicon

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