Dual low coherence scanning interferometry for rapid large step height and thickness measurements
Author:
Funder
Chosun University (CU)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference17 articles.
1. High-speed noncontact profiler based on scanning white-light interferometry
2. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry
3. Stroboscopic white-light interferometry of vibrating microstructures
4. Phase-shifting errors in interferometric tests with high-numerical-aperture reference surfaces
5. White-Light Interferometric Thickness Gauge
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