High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference10 articles.
1. Layered synthetic microstructure technology considerations for the extreme ultraviolet
2. Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator
3. Theoretical and experimental study of soft X-ray diffraction by a lamellar multilayer amplitude grating
4. Rigorous formulation of scattering and guidance by dielectric grating waveguides: general case of oblique incidence
5. Full-Wave Analysis of Dielectric Frequency-Selective Surfaces Using a Vectorial Modal Method
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