Theoretical and experimental study of soft X-ray diffraction by a lamellar multilayer amplitude grating
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IOP Publishing
Reference12 articles.
1. Dynamical theory of diffraction at in-depth multilayered gratings
2. Diffraction and scattering by lamellar amplitude multilayer gratings in the X-UV region
3. A review of microfabrication technologies: Application to X-ray optics
4. Characterization of a multilayer coated laminar reflection grating at λ = 0.154 nm
5. Diffraction properties of a 0.24-um period multilayer laminar amplitude grating in the soft x-ray region
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1. Multilayer X-ray interference structures;Physics-Uspekhi;2019-11-01
2. Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics;Applied Physics Reviews;2017-03
3. Unified analytical theory of single-order soft x-ray multilayer gratings;Journal of the Optical Society of America B;2015-03-02
4. Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range;AIP Advances;2013-01
5. Improved resolution for soft-x-ray monochromatization using lamellar multilayer gratings;SPIE Proceedings;2011-09-08
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