Annealing dependence of residual stress and optical properties of TiO_2 thin film deposited by different deposition methods
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Publisher
The Optical Society
Reference16 articles.
1. Comparison of the properties of titanium dioxide films prepared by various techniques
2. Influence of the temperature on the properties of sputtered titanium oxide films
3. Mechanical characteristics of optical coatings prepared by various techniques: a comparative study
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