Linear polarization-separating metalens at long-wavelength infrared

Abstract

We designed and fabricated a linear polarization-separation metalens (PSM) made of single-crystal silicon (sc-Si) for long-wavelength infrared (LWIR) imaging. The PSM comprises sc-Si dielectric waveguide pillar meta-atoms with rectangular cross-sections, providing a full 2π phase delay range for two orthogonal linear polarization components with high transmittances (>70%). Electron beam lithography and deep reactive ion etching were used to fabricate the PSM. Polarization-separation imaging of elevated and ambient temperature objects was demonstrated with high extinction ratios of 21.8 dB and 12.8 dB for the x- and y-polarizations, respectively. Additionally, polarization-sensitive imaging was demonstrated by distinguishing the surfaces of a hand and toy windows. Our work enables the visualization of invisible information in the LWIR region and has widespread applications.