Abstract
A microbubble-probe whispering gallery mode resonator with high displacement resolution and spatial resolution for displacement sensing is proposed. The resonator consists of an air bubble and a probe. The probe has a diameter of ∼5 µm that grants micron-level spatial resolution. Fabricated by a CO2 laser machining platform, a universal quality factor of over 106 is achieved. In displacement sensing, the sensor exhibits a displacement resolution of 74.83 pm and an estimated measurement span of 29.44 µm. As the first microbubble probe resonator for displacement measurement, the component shows advantages in performance, and exhibits a potential in sensing with high precision.
Funder
National Natural Science Foundation of China
Basic and Applied Basic Research Foundation of Guangdong Province
Shenzhen Science and Technology Innovation Program
Subject
Atomic and Molecular Physics, and Optics
Cited by
8 articles.
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