Direct photolithographic deforming of organomodified siloxane films for micro-optics fabrication-Reference-Cited by-同舟云学术

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Direct photolithographic deforming of organomodified siloxane films for micro-optics fabrication

Published:2002-07-01 Issue:19 Volume:41 Page:3988
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Kärkkäinen Ari H. O.,Tamkin John M.,Rogers Jeremy D.,Neal Daniel R.,Hormi Osmo E.,Jabbour Ghassan E.,Rantala Juha T.,Descour Michael R.

Publisher

The Optical Society

Reference17 articles.

1. Transferring resist microlenses into silicon by reactive ion etching

2. Binary-phase zone-plate arrays based on hybrid solgel glass

3. Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

4. Direct UV patterning of thick hybrid glass films for micro-opto-mechanical structures

5. Photoinscription of Surface Relief Gratings on Azo-Hybrid Gels

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2. Active Electronics;Inkjet Technology for Digital Fabrication;2014-05-30

3. Laser Surface Patterning;Comprehensive Materials Processing;2014

4. Characterization of coating processes in Moiré Diffraction Gratings for strain measurements;Optics & Laser Technology;2013-04

5. Maskless fabrication of three-dimensional microstructures with high isotropic resolution: practical and theoretical considerations;Applied Optics;2011-05-24

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