Direct UV patterning of thick hybrid glass films for micro-opto-mechanical structures
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20000429?crawler=true&mimetype=application/pdf
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4. Sol-gel integrated optical coupler by ultraviolet light imprinting
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