High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method
Author:
Publisher
The Optical Society
Reference6 articles.
1. Phase-sensitive vision technique for high accuracy position measurement of moving targets
2. Automatic mask alignment in the theta direction using moire sensors
3. Automatic mask alignment without a microscope
4. Novel two-dimensional position measurement method with linear array charge-coupled device
5. A new alignment technique for steppers: Hybrid marks®
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