Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup
Author:
Funder
Japan Society for the Promotion of Science (JSPS)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference22 articles.
1. Measurement technologies for precision positioning
2. A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage
3. Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements
4. A new vacuum interferometric comparator for calibrating the fine linear encoders and scales
5. Long Range 3 D Scanning Tunnelling Microscopy
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