A new vacuum interferometric comparator for calibrating the fine linear encoders and scales

Author:

Sawabe M,Maeda F,Yamaryo Y,Simomura T,Saruki Y,Kubo T,Sakai H,Aoyagi S

Publisher

Elsevier BV

Subject

General Engineering

Reference6 articles.

1. The Development of an interferometer for calibrating linear scales;Noguchi;Mitutoyo Tech. Bull.,1989

2. Sawabe M, Noguchi H, Makino T. An interferometer for measurement of grating and index scale, progress in precision engineering. In: Proceedings of the 6th IPES and 2nd IC on UME. Braunschweig, Germany: 1991. p. 308–10.

3. Yoshiike K. The measurement environment nine meters underground, Mitutoyo technical information no. STD-008; 1990.

4. Sawabe M, Ohta S, Hiroshima S. Traceability of optical length measurements. In: Proceedings of SPIE Vol. 954, Optical Testing and Metrology II. Dearborn, USA: 1988. p. 448–54.

5. Ueda M, Numata A, Sawabe M. Calibrated wavelength results of commercial stabilized He–Ne leasers. In: Proceeding of 1997 National Conference of Standard Laboratory. Atlanta, USA: 1997. p. 775–84.

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