Computer-generated holograms fabricated by direct write of positive electron-beam resist
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference9 articles.
1. Blazed gratings and Fresnel lenses fabricated by electron-beam lithography
2. Rectangular-apertured micro-Fresnel lens arrays fabricated by electron-beam lithography
3. Blazed reflection micro-Fresnel lenses fabricated by electron-beam writing and dry development
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