Multilevel phase holograms manufactured by electron-beam lithography
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference6 articles.
1. Trends in lithography
2. Electron Beam Fabrication Of Computer-Generated Holograms
3. Fabrication of micro lenses using electron-beam lithography
4. Blazed gratings and Fresnel lenses fabricated by electron-beam lithography
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