C/Si multilayer mirrors for the 25–30-nm wavelength region
Author:
Publisher
The Optical Society
Reference6 articles.
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1. Spectroscopic Techniques: Ultraviolet;Springer Handbook of Atomic, Molecular, and Optical Physics;2023
2. Narrowband Mg/SiC Multilayers Working around 30.4 nm;Optical Interference Coatings Conference (OIC) 2019;2019
3. Attosecond Pulse Shaping by Multilayer Mirrors;Applied Sciences;2018-12-05
4. Structure and extreme ultraviolet performance of Si/C multilayers deposited under different working pressures;Applied Optics;2016-12-14
5. Multilayer optics for coherent EUV/X-ray laser sources;SPIE Proceedings;2015-09-22
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