High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module-Reference-Cited by-同舟云学术

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

Published:2014-04-09 Issue:11 Volume:53 Page:2446
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Liżewski Kamil,Tomczewski Sławomir,Kozacki Tomasz,Kostencka Julianna^ORCID

Funder

Center for Advanced Studies, Warsaw University of Technology

Faculty of Mechatronics of Warsaw University of Technology

National Science Centre

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference44 articles.

1. Microoptical components for information optics and photonics;DebaesFriberg,2009

2. Characterization of microlenses by digital holographic microscopy

3. Shape measurement of microscopic structures using digital holograms

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