Heterodyne interferometer with two parallel-polarized input beams for high-resolution roll angle measurement-Reference-Cited by-同舟云学术

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Heterodyne interferometer with two parallel-polarized input beams for high-resolution roll angle measurement

Published:2019-04-29 Issue:10 Volume:27 Page:13820
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Qi Jingya,Wang Zhao,Huang Junhui,Wang Qing,Gao Jianmin

Funder

China Sponsorship Council

National Natural Science Foundation of China

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference23 articles.

1. Recent advances in displacement measuring interferometry

2. High resolution heterodyne interferometer without detectable periodic nonlinearity

3. Green laser interferometric metrology system with sub-nanometer periodic nonlinearity

4. Laser heterodyne interferometer with rotational error compensation for precision displacement measurement

5. Spatially separated heterodyne grating interferometer for eliminating periodic nonlinear errors

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