Modeling and analysis of the mid-spatial- frequency error characteristics and generation mechanism in sub-aperture optical polishing
Author:
Funder
Youth Innovation Promotion Association
Joint Fund of Astronomy
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference30 articles.
1. New results extending the Precessions process to smoothing ground aspheres and producing freeform parts
2. Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP
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5. Corrective polishing of complex ceramics geometries
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