Pressure-dependent rate saturation in photodeposition from W(CO)_6
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
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1. Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO)6with improved conductivity and resolution;Nanotechnology;2013-09-17
2. 3D Microengineering via Laser Direct-Write Processing Approaches;Direct-Write Technologies for Rapid Prototyping;2002
3. Kinetics of laser‐photochemical deposition by gas‐phase dissociation;Journal of Applied Physics;1991-01-15
4. Laser photolytic deposition of molybdenum and tungsten thin film microstructures;Applied Physics A Solids and Surfaces;1990-02
5. Laser-assisted deposition of thin films from gas-phase and surface-adsorbed molecules;Chemical Reviews;1989-09-01
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