10-pm-order mechanical displacement measurements using heterodyne interferometry
Author:
Funder
Japan Society for the Promotion of Science
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference24 articles.
1. Michelson interferometry with 10 pm accuracy
2. Subpicometer length measurement using heterodyne laser interferometry and all-digital rf phase meters
3. Picometre displacement measurements using a differential Fabry–Perot optical interferometer and an x-ray interferometer
4. A portable picometer reference actuator with 100 µm range, picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale
5. 3D push–pull heterodyne interferometer for SPM metrology
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2. High-Speed Displacement Measurement of an Ultrasonic Vibratory Tool Using Heterodyne Interferometry and Lock-In Amplifier;Lecture Notes in Mechanical Engineering;2024
3. Stability and Resolution of a Conventional Displacement Measuring Heterodyne Interferometer Using a Single Phase-Locked Loop;Experimental Mechanics;2023-06-01
4. Periodic nonlinearity of a frequency-modulated homodyne interferometer using least-squares circle fitting and subtraction;Applied Physics B;2023-05-05
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