Development of Band-Limitless Demodulation Method for Sinusoidal Phase Modulation Interferometry (Evaluation of Noise Floors, Maximum Measurement Speeds and Resolutions)-Reference-Cited by-同舟云学术

Development of Band-Limitless Demodulation Method for Sinusoidal Phase Modulation Interferometry (Evaluation of Noise Floors, Maximum Measurement Speeds and Resolutions)

Published:2024-01-05 Issue:1 Volume:90 Page:153-158
ISSN:0912-0289
Container-title:Journal of the Japan Society for Precision Engineering
language:en
Short-container-title:Journal of the Japan Society for Precision Engineering

Author:

HIGUCHI Masato¹,KATAGIRI Katsunari²,NAKAGAWA Takehiro³,SATO Taku⁴,AKETAGAWA Masato⁵

Affiliation:

1. 長岡技術科学大学大学院（現，群馬高専）

2. 長岡技術科学大学大学院（現，信越エンジニアリング株式会社）

3. 長岡技術科学大学大学院（現，三菱電機）

4. 長岡技術科学大学大学院

5. 長岡技術科学大学

Publisher

Japan Society for Precision Engineering

Link

https://www.jstage.jst.go.jp/article/jjspe/90/1/90_153/_pdf

Reference26 articles.

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2. 2) INTERNATIANL ROADMAP FOR DEVICE AND SYSTEMSTM 2022 UPDATE, MORE MOORE, IEEE, https://irds.ieee.org/images/files/pdf/2022/2022IRDS_MM.pdf accessed 2023/4/8.

3. 3) Canon Global，しくみと技術 FPD露光装置, https://global.canon/ja/technology/fpd2021s.html accessed 2023.7.18

4. 4) For example of homodyne interferometer, Renishaw XL-80, https://www.renishaw.jp/jp/xl-80-laser-system--8268 accessed 2023.4.8.

5. 5) For example of heterodyne interferometer, Keysight Technologies optics and Lase Heads for Laser-Interferometer Positioning System, See https://www.keysight.com/jp/ja/assets/7018-06711/technical-overviews/5964-6190.pdf accessed 2023.4.8.