Spectrally resolved phase-shifting interferometry of transparent thin films: sensitivity of thickness measurements
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Publisher
The Optical Society
Reference12 articles.
1. Interferometric surface profiling with white light: Effects of surface films
2. White-light interference microscopy: effects of multiple reflections within a surface film
3. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry
4. Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter
5. Direct spectral phase function calculation for dispersive interferometric thickness profilometry
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