High accuracy cross-sectional shape analysis by coherent soft x-ray diffraction-Reference-Cited by-同舟云学术

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High accuracy cross-sectional shape analysis by coherent soft x-ray diffraction

Published:2020-09-25 Issue:28 Volume:59 Page:8661
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Hoshino Tetsuya^ORCID,Shiono Masahiko,Saswatee Banerjee,Aoki Sadao,Sakurai Kenji,Itoh Masahide

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference39 articles.

1. Advantages of soft X-ray absorption over TEM-EELS for solid carbon studies––a comparative study on diesel soot with EELS and NEXAFS

2. Three-Dimensional Visualization of a Human Chromosome Using Coherent X-Ray Diffraction

3. Effect of absorption on light scattering by agglomerated debris particles

4. Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Scatterometry of isolated resist pattern by soft X-rays using deep-learning analysis;Digital Holography and 3-D Imaging 2022;2022

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