Author:
Hoshino Tetsuya,Aoki Sadao,Itoh Masahide,Shichiri Motoharu,Itoh Hiroshi
Abstract
When the scattering or absorption is large, the 3D resolution is about 100 wavelengths in holography, but the combination of scatterometry, imaging, and deep learning is a general-purpose method with a resolution of about wavelength.