Theoretical model and digital extraction of subsurface damage in ground fused silica

Author:

Xiao Huapan12,Yin Shenxin1,Wu Heng3ORCID,Wang Hairong4,Liang Rongguang3

Affiliation:

1. Chongqing University

2. The Hong Kong Polytechnic University

3. University of Arizona

4. Xi’an Jiaotong University

Abstract

Based on the fracture mechanics and grinding kinematics, a theoretical model is developed to determine various subsurface damage (SSD) parameters and roughness Rz of the ground brittle material with consideration of the material removal mode and spring back. Based on the image processing, a digital method is proposed to extract various SSD parameters from the cross-section micrograph of the ground sample. To verify the model and method, many fused silica samples are ground under different processing parameters, and their SSD depth and roughness Rz are measured. The research results show the average SSD depth (SSDa) can be expressed as SSDa = χ1Rz4/3 + χ2Rz (χ1 and χ2 are coefficients). The SSDa is closer to half of the maximum SSD depth (SSDm) as the wheel speed decreases or the grinding depth, feed speed, or abrasive diameter increases. The SSD length or density basically increases linearly with the increase of the SSDm. The digital method is reliable with a largest relative error of 6.65% in SSD depth, extraction speed of about 1.63s per micrograph, and good robustness to the micrograph size and small-scale residue interference. The research will contribute to the evaluation of SSDs and the optimization of the grinding process of fused silica.

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Chongqing Special Postdoctoral Science Foundation

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3