Relationship between surface μ‐roughness and interface slurry particle spatial distribution during glass polishing
Author:
Affiliation:
1. Lawrence Livermore National Laboratory Livermore California
Funder
U.S. Department of Energy
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1111/jace.14820
Reference20 articles.
1. Large Optics for the National Ignition Facility
2. Toward Deterministic Material Removal and Surface Figure During Fused Silica Pad Polishing
3. Convergent Pad Polishing of Amorphous Silica
4. Influence of Temperature and Material Deposit on Material Removal Uniformity during Optical Pad Polishing
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