Optical MEMS pressure sensor based on a mesa-diaphragm structure
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference8 articles.
1. Laser-machined fibers as Fabry-Perot pressure sensors
2. A novel MEMS pressure sensor fabricated on an optical fiber
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5. The design, fabrication, and testing of corrugated silicon nitride diaphragms
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