A MEMS light modulator based on diffractive nanohole gratings
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference19 articles.
1. Digital micromirror device and its application to projection displays
2. MEMS-based interferometric modulator for display applications
3. Optical Pattern Generation Using a Spatial Light Modulator for Maskless Lithography
4. Resonant grating waveguide structures
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