1. Ecole Polytechnique Federale de Lausanne, Advanced Nano-Mechanical Systems Laboratory, EPFL STI IGM NEMS, Station 9, CH-1015 Lausanne, Switzerland
2. Ecole Polytechnique Federale de Lausanne, Nanophotonics and Metrology Laboratory, EPFL STI IMT NAM, Station 11, CH-1015 Lausanne, Switzerland
3. School of Aerospace, Mechanical and Mechatronic Engineering, Mechanical Engineering (J07), University of Sydney, Blackwattle Creek Ln, Darlington, NSW 2008, Australia