Author:
Butt Jordan N.,Tyndall Nathan F.,Pruessner Marcel W.,Miller Benjamin L.,Fahrenkopf Nicholas M.,Antohe Alin O.,Stievater Todd H.
Abstract
Wafer-scale variation of waveguide dimensions and refractive index determine the fabrication yield and design tolerances of photonic integrated circuits. We describe a technique to accurately measure the statistical properties of these parameters for dielectric waveguides.