Author:
Sun Fujun,Yang Gang,Zhang Peng,Han Jianghao,Hu Yanpeng,Gao Jianfeng,Li Junjie,He Xiaobin,Li Zhihua,Luo Jun,Wang Wenwu,Yang Yan
Abstract
Experimental results of controlled Fano lineshapes in coupled nanobeam cavity-waveguide structure by tuning the defect waveguide are reported. The devices are fabricated on a standard full-process CMOS passive multi-project-wafer run with 180 nm technology node. This work provides potential for advanced and scalable integrated photonics applications.