Author:
Arnold Kellen P.,Allen Joshua A.,Halimi Sami I.,Ryder Landen D.,Afzal Francis O.,Bian Yusheng,Aboketaf Abdelsalam,Dezfulian Kevin,Rakowski Michal,Augur Rod,Hirokawa Takako,Nummy Karen,Weiss Sharon M.
Abstract
We report deep subwavelength-engineered slotted photonic crystal nanobeams with minimum features <70 nm fabricated using a 90 nm monolithic silicon photonics technology at GlobalFoundries. This work enables potential for scalable, advanced integrated photonics applications.
Cited by
1 articles.
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